產品名稱：Yaskawa XU-RCM53 Series
產品編號：XU-RCM53 Series
產品介紹
XU-RCM53E0應用機型：Ebara CMP Wet Robot
XU-RCM53E0A應用機型：Ebara CMP Dry Robot
XU-RCM5301應用機型：Ebara CMP Wet Robot
XU-RCM5300應用機型：Ebara CMP Wet Robot
XU-RCM5301A應用機型：Ebara CMP Dry Robot
| 型式 | Repair | Overhaul | Exchange |
| Yaskawa XU-RCM53E0 |  | | |
| Yaskawa XU-RCM53E0A | | | |
| Yaskawa XU-RCM5301 | | | |
| Yaskawa XU-RCM5300 | | | |
| Yaskawa XU-RCM5301A | | |