產品名稱:Yaskawa XU-RCM53 Series
產品編號:XU-RCM53 Series
產品介紹
XU-RCM53E0應用機型:Ebara CMP Wet Robot
XU-RCM53E0A應用機型:Ebara CMP Dry Robot
XU-RCM5301應用機型:Ebara CMP Wet Robot
XU-RCM5300應用機型:Ebara CMP Wet Robot
XU-RCM5301A應用機型:Ebara CMP Dry Robot
型式 | Repair | Overhaul | Exchange |
Yaskawa XU-RCM53E0 | ![]() | ![]() | |
Yaskawa XU-RCM53E0A | ![]() | ![]() | |
Yaskawa XU-RCM5301 | ![]() | ![]() | ![]() |
Yaskawa XU-RCM5300 | ![]() | ![]() | ![]() |
Yaskawa XU-RCM5301A | ![]() | ![]() |