產品名稱:4 Series Robot
產品編號:6010004_3
產品介紹
ATM-405應用機型:
KLA_量測機台
ATM-407應用機型:
KLA_Surfscan、AMAT Producer
ABM-405應用機型:
AMAT_Producer、AMAT_Quantum、OP
ABM-407應用機型:
Rudolph_量測機台
ABM-407B應用機型:
KLA_量測機台
型式 | Repair | Overhaul | Exchange |
ATM-405 | ![]() | ![]() | ![]() |
ATM-407 | ![]() | ![]() | ![]() |
ABM-405 | ![]() | ![]() | ![]() |
ABM-407 | ![]() | ![]() | |
ABM-407B | ![]() | ![]() | ![]() |