產品名稱：Pre-Aligner
產品編號：Pre-Aligner
產品介紹
PRE-200/200B/201/201B應用機型：For 8 ” Wafer
PRE-300/300B/301/301B應用機型：For 12 ” Wafer
| 型式 | Repair | Overhaul | Exchange |
| PRE-200 |  | | |
| PRE-200B | | | |
| PRE-201 | | | |
| PRE-201B | | | |
| PRE-300 | | | |
| PRE-300B | | | |
| PRE-301 | | | |
| PRE-301B | | | |
PRE-200/200B/201/201B應用機型：For 8 ” Wafer
PRE-300/300B/301/301B應用機型：For 12 ” Wafer
| 型式 | Repair | Overhaul | Exchange |
| PRE-200 | | | |
| PRE-200B | | | |
| PRE-201 | | | |
| PRE-201B | | | |
| PRE-300 | | | |
| PRE-300B | | | |
| PRE-301 | | | |
| PRE-301B | | | |